13 Va. Admin. Code § 5-52-320 – IFC Chapter 27 Semiconductor Fabrication Facilities.

A. Change Section 2701.1 to read:
2701.1 Scope. The operation and maintenance of semiconductor fabrication facilities and comparable research and development areas classified as Group H-5 shall comply with this chapter The use, storage, and handling of hazardous materials in Group H-5 shall comply with this chapter, other applicable provisions of this code, and requirements of the applicable building code.
B. Delete Section 2701.4.
C. Change Section 2701.5 to read:
2701.5 Permits. Permits shall be required as set forth in Section 107.2.
D. Change Section 2703.1.3 to read:
1. 1. Automatic sprinkler system alarm and monitoring systems.
2. 2. Manual fire alarm systems.
3. 3. Emergency alarm systems.
4. 4. Continuous gas detection systems.
5. 5. Smoke detection systems.
6. 6. Emergency power system.
7. 7. Automatic detection and alarm systems for pyrophoric liquids and Class 3 water-reactive liquids required by Section 2705.2.3.4.
8. 8. Exhaust ventilation flow alarm devices for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required by Section 2705.2.3.4.
2703.1.3 Signals. Unless otherwise permitted by the applicable building code, the emergency control station shall receive signals from emergency equipment and alarm and detection systems. Such emergency equipment and alarm and detections systems include the following where such equipment or systems are required by the applicable building code:
E. Change Section 2703.2.2 to read:
2703.2.2 General requirements. In addition to the requirements in Section 2703.2, systems, equipment, and other processes shall also comply with Section 5003.2, other applicable provisions of this code, and the applicable building code.
F. Delete Sections 2703.3 and 2703.3.1.
G. Change Sections 2703.3.2 through 2703.3.8 to read:
2703.3.2 Pass-throughs in exit access corridors. Pass-throughs in exit access corridors shall comply with the applicable building code.
2703.3.3 Liquid storage rooms. Liquid storage rooms shall comply with Chapter 57 and the applicable building code.
2703.3.4 HPM rooms. Hazardous production materials (HPM) rooms shall comply with the applicable building code.
2703.3.5 Gas cabinets. Gas cabinets shall comply with Section 5003.8.6.
2703.3.6 Exhausted enclosures. Exhausted enclosures shall be maintained in accordance with Section 5003.8.5 and remain in accordance with the applicable building code.
2703.3.7 Gas rooms. Gas rooms shall be maintained in accordance with Section 5003.8.4 and remain in accordance with the applicable building code.
2703.3.8 Service corridors. Service corridors shall comply with Section 2705.3 and remain in accordance with the applicable building code.
H. Change Sections 2703.7 and 2703.7.1 to read:
2703.7 Electrical wiring and equipment. Electrical wiring and equipment in HPM facilities shall comply with Sections 2703.7.1 through 2703.7.3.
2703.7.1 Fabrication areas. Electrical wiring and equipment in fabrication areas shall be maintained in accordance with the applicable provisions of NFPA 70 and remain in accordance with the applicable building code.
I. Add Section 2703.7.2 to read:
2703.7.2 Workstations. Electrical equipment and devices within five feet (1524 mm) of workstations in which flammable or pyrophoric gases or flammable liquids are used shall be maintained in accordance with the applicable provisions of NFPA 70 for hazardous locations. Workstations shall not be energized without adequate exhaust ventilation in accordance with Section 2703.14.
Exception: Not required when the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.
J. Change Section 2703.7.3 to read:
2703.7.3 Hazardous production material (HPM) rooms, gas rooms, and liquid storage rooms. Electrical wiring and equipment in HPM rooms, gas rooms, and liquid storage rooms shall be maintained in accordance with the applicable provisions of NFPA 70 and remain in accordance with the applicable building code.
K. Change Section 2703.10 to read:
2703.10 Automatic sprinkler system. Where required by the applicable building code automatic sprinkler systems shall be maintained in accordance with Chapter 9.
L. Delete Sections 2703.10.1 and 2703.10.1.1.
M. Delete Sections 2703.10.2 through 2703.10.4.4.1.
N. Change Sections 2703.10.4.4.2 and 2703.10.4.4.3 to read:
2703.10.4.4.2 Control valve. Control valves provided for sprinklers installed in exhaust ducts shall be maintained in accordance with the applicable building code.
2703.10.4.4.3 Drainage. Drainage provided to remove sprinkler water discharged in exhaust ducts shall be maintained.
O. Delete Section 2703.10.4.4.4.
P. Change Sections 2703.10.5 through 2703.12 to read:
2703.10.5 Sprinkler alarms and supervision. Automatic sprinkler systems, associated electronic supervision, and alarms shall be maintained in accordance with Chapter 9. Where required by the applicable building code, automatic sprinkler system alarm and supervisory signals shall also remain transmitted to the emergency control station.
2703.11 Manual fire alarm system. Where provided, a manual fire alarm system shall be maintained in accordance with Chapter 9 and remain throughout buildings containing a Group H-5 occupancy in accordance with the applicable building code. Where required by the applicable building code, activation of the alarm system shall also be maintained to transmit a signal to the emergency control station.
2703.12 Emergency alarm system. Emergency alarm systems shall be maintained in accordance with Chapter 9 and remain in accordance with the applicable building code. Where required by the applicable building code, emergency alarm systems shall also remain transmitted to the emergency control station.
Q. Delete Sections 2703.12.1 and 2703.12.1.1.
R. Delete Sections 2703.12.1.2 and 2703.12.1.3.
S. Delete Sections 2703.12.2 and 2703.12.3.
T. Change Section 2703.13 to read:
2703.13 Continuous gas detection systems. Where required by the applicable building code, a continuous gas detection system shall be maintained for HPM gases. Such a system shall remain in accordance with the applicable building code where the physiological warning threshold level of the gas is at a higher level than the accepted permissible exposure limit (PEL) for the gas and for flammable gases.
U. Delete Section 2703.13.1 and add Section 2703.13.2.
1. 1. Immediately dangerous to life and health (IDLH) values when the monitoring point is within an exhausted enclosure, ventilated enclosure or gas cabinet.
2. 2. Permissible exposure limit (PEL) levels when the monitoring point is in an area outside an exhausted enclosure, ventilated enclosure, or gas cabinet.
3. 3. For flammable gases, the monitoring detection threshold level shall be vapor concentrations in excess of 25% of the lower flammable limit (LFL) when the monitoring is within or outside an exhausted enclosure, ventilated enclosure, or gas cabinet.
4. 4. Except as noted in this section, monitoring for highly toxic and toxic gases shall also comply with Chapter 60.
2703.13.2 Gas detection system operation. Where required by the applicable building code, a continuous gas detection system shall be maintained capable of monitoring the room, area, or equipment in which the gas is located at or below all the following gas concentrations:
V. Change Section 2703.14 to read:
2703.14 Exhaust ventilation systems for HPM. Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall be maintained and operated in accordance with this chapter and other applicable provisions of this code and remain in accordance with the applicable building code.
W. Delete Section 2703.14.2 and add Section 2703.14.1 to read:
1. 1. Fabrication areas: Exhaust ventilation for fabrication areas shall comply with the applicable building code.
2. 2. Workstations: A ventilation system shall be maintained to capture and exhaust gases, fumes, and vapors at workstations.
3. 3. Liquid storage rooms: Exhaust ventilation for liquid storage rooms shall comply with the applicable building code.
4. 4. HPM rooms: Exhaust ventilation for HPM rooms shall comply with the applicable building code.
5. 5. Gas cabinets: Exhaust ventilation for gas cabinets shall comply with Section 5003.8.6.2. The gas cabinet ventilation system is allowed to connect to a workstation ventilation system. Exhaust ventilation for gas cabinets containing highly toxic or toxic gases shall also comply with Chapter 60.
6. 6. Exhausted enclosures: Exhaust ventilation for exhausted enclosures shall comply with Section 5003.8.5.2. Exhaust ventilation for exhausted enclosures containing highly toxic or toxic gases shall also comply with Chapter 60.
7. 7. Gas rooms: Exhaust ventilation for gas rooms shall comply with Section 5003.8.4.2 and the applicable building code. Exhaust ventilation for gas rooms containing highly toxic or toxic gases shall also comply with Chapter 60.
8. 8. Cabinets containing pyrophoric liquids or Class 3 water-reactive liquids: Exhaust ventilation for cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids shall be as required in Section 2705.2.3.4.
2703.14.1 Operations and maintenance of HPM areas. Exhaust ventilation systems shall be maintained in the following locations in accordance with the requirements of this section and the applicable building code:
X. Change Section 2703.15 to read:
2703.15 Emergency power system. Where required by the applicable building code, an emergency power system shall be maintained in accordance with Section 603.
Y. Change Section 2703.15.1 to read:
1. 1. HPM exhaust ventilation systems.
2. 2. HPM gas cabinet ventilation systems.
3. 3. HPM exhausted enclosure ventilation systems.
4. 4. HPM gas room ventilation systems.
5. 5. HPM gas detection systems.
6. 6. Emergency alarm systems.
7. 7. Manual fire alarm systems.
8. 8. Automatic sprinkler system monitoring and alarm systems.
9. 9. Automatic alarm and detection systems for pyrophoric liquids and Class 3 water-reactive liquids required in Section 2705.2.3.4.
10. 10. Flow alarm switches for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required in Section 2705.2.3.4.
11. 11. Electrically operated systems required elsewhere in this code or in the applicable building code that are applicable to the use, storage, or handling of HPM.
2703.15.1 Required electrical systems. Where provided or required by the applicable building code, emergency power shall be maintained for electrically operated equipment and connected control circuits, including the following systems in accordance with the applicable building code:
Z. Change Sections 2703.15.2 , 2703.16, 2704.1, and 2704.2.1 to read:
1. 1. Flammable and combustible liquid storage cabinets shall comply with Section 5704.3.2.
2. 2. Hazardous materials storage cabinets shall comply with Chapter 50.
3. 3. Gas cabinets shall comply with Chapter 50. Gas cabinets for highly toxic or toxic gases shall also comply with Chapter 60.
4. 4. Exhausted enclosures shall comply with Chapter 50. Exhausted enclosures for highly toxic or toxic gases shall also comply with Chapter 60.
5. 5. Workstations shall comply with Section 2705.2.3.
  AA. Change Section 2704.2.2.1 to read:
  2704.2.2.1 Storage and use in fabrication areas. The maximum quantities of hazardous materials stored or used in a single fabrication area shall not exceed the quantities set forth in Table 2704.2.2.1 unless otherwise approved by the applicable building code.
  BB. Change Section 2704.3.1 to read:
  2704.3.1 HPM storage. The indoor storage of HPM in quantities greater than those listed in Sections 5003.1.1 and 5704.3.4 shall be approved by the building official and located in a room complying with the requirements of the applicable building code and this code for a liquid storage room, HPM room, or gas room as appropriate for the materials stored.
  CC. Change Section 2705.1 to read:
  2705.1 General. The use and handling of hazardous materials shall comply with this section, Section 2703, and other applicable provisions of this code to the extent that such requirements are operational in nature and do not affect how a building is constructed.
  DD. Change Section 2705.2.3.2 to read:
  2705.2.3.2 Protection of vessels. Vessels containing hazardous materials located in or connected to a workstation shall be protected as follows:
6. 1. HPM: Vessels containing HPM shall be protected from physical damage and shall not project from the workstation.
7. 2. Compressed gases: Protection for compressed gas vessels shall also comply with Section 5303.5.
8. 3. Cryogenic fluids: Protection for cryogenic fluid vessels shall also comply with Section 5503.5.
  EE. Change Section 2705.3.1 to read:
  2705.3.1 Corridors and enclosures for stairways and ramps. Corridors and enclosures for exit stairways and ramps in new fabrication areas shall not contain HPM, except as permitted in corridors by Section 2705.3.2 and the applicable building code.
  FF. Change Sections 2705.3.2.1 and 2705.3.3 to read:
  2705.3.2.1 Existing fabrication area transportation. Where existing fabrication areas are not required by the applicable building code to utilize approved service corridors, HPM is allowed to be handled and transported in accordance with Section 5003.10.
  2705.3.3 Service corridors. Where service corridors are required by the applicable building code and transportation of HPM from a liquid storage room, HPM room, or gas room or from the outside of a building to the perimeter wall of a fabrication area is necessary, such transport shall be through approved service corridors.
2703.15.2 Exhaust ventilation systems. Where permitted by the applicable building code exhaust ventilation systems are allowed to be maintained to operate at not less than one-half the normal fan speed on the emergency power system when it is demonstrated that the level of exhaust will maintain a safe atmosphere.
2703.16 Subatmospheric pressure gas systems. Subatmospheric pressure gas systems (SAGS) shall be maintained in accordance with the applicable provisions of NFPA 318 and the applicable building code.
2704.1 General. Storage of hazardous materials shall comply with Section 2703 and this section and other applicable provisions of this code.
2704.2.1 Location of HPM storage in fabrication areas. Storage of HPM in fabrication areas shall be maintained within approved or listed storage cabinets, gas cabinets, or exhausted enclosures or within a workstation as follows.

Statutory Authority

§ 27-97 of the Code of Virginia.

Historical Notes

Derived from Virginia Register Volume 40, Issue 9, eff. January 18, 2024.